OLED-on-CMOS-(OLEDoS)

©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deTechnologyTrendandApplicationofOLED-on-CMOS(OLEDoS)CenterforOrganicMaterialsandElectronicDevicesDresden(COMEDD)FraunhoferInstituteforPhotonicMicrosystems(IPMS),Dresden,D-01109,Germany2©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.detimecomplexityMonochromePM-DisplayMulticolorPM-DisplayFullcolorPM-DisplayFullcolorAM-DisplayMicrodisplaySee-throughMicrodisplayMobileProjectionDisplayMobileFlexibleDisplayiARMobiledisplaydrivingforces:Multimediacontentinformationnavigationbyuserinteraction(touchscreen,...)augmented-reality(AR)MobileDisplayDilemmamicro-displays(<1.3”)3©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deDefinitionPhysicallyverysmall,butHighinformationcontent(TVquality)Activematrixsubstrate(oftenCMOS)LowpowerconsumptionEnlargedimageviewedthroughmagnifyingopticsApplicationsProjectionRearprojectionFrontprojectionMicroprojectionNear-to-Eye(NTE)ElectronicViewfinder(EVF)Hand-heldHeadMountedDisplay(HMD)ProfessionalConsumerMicrodisplays:Definition,Application(general)4©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deOLED-on-CMOS(OLED-on-Silicon/OLEDoS)5©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deKeyfeatureshighly-efficientOLEDlightsourcein/onCMOSextremelythin(~100nm)small-molecules/vaporphase(SM-OLED)polymers/liquidphase(P-LED)arbitraryshapesallcolorsmonochrome,white,NIRexcellentcurrent/powerefficiency(low-voltage,low-power)good/improvinglifetime(several10kh)self-emissivefastresponsetime(MHz)electronicsfeatureintegrationdriving,acqusition,processing,controlsensorco-integrationCMOS-compatiblesensorsembeddedphotodetectorstemperaturemagnetic(Hall)M(O)EMS,...Lightemission+_top-emittingintransparentsubstratetransparentconductororganiclayersmetalcathodesubstrate(SiliconCMOSwafer)CMOScross-sectionwithOLEDontopIntroductionOLED-on-CMOS6©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.de-5-4-3-2-101234510-610-510-410-310-210-1100101102101102103104105orangeemitterredemitterwhiteemittersystemCurrentdensity[mA/cm²]Voltage[V]Luminance[cd/m²]Top-emittingp-i-nOLEDbasedonsmallmolecules(NOVALEDAG)evaporatedonSi-waferintransparentbottomelectrode(Si-CMOSsubstrate)transparenttopelectrodehightransparencylowsheetresistivityAg,AlorYbDopedchargetransportlayersyieldbetterOLEDperformancereduceoperatingvoltageavoidCMOSHVdeviceslowerpowerdissipationatequivalentradiance5.711.614.1Currentefficiency[Cd/A]@100cd/m²4.73.2white12.0003.22.5ora3.12.4red@1000cd/m²@100cd/m²lifetime@1000cd/m²Voltage[V]IntroductionOLED-on-CMOS7©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deOLEDpost-processingSUNICELplus200bySunicSystem,Ltd.(Korea)Siliconandquartzwafer:Ø150mm/6“,Ø200mm/8“,thickness:0.6to0.8mmConfiguration7processchambers12organicsources5inorganicsources2PVDsourcesAr/O2plasmaactivitationCycletime:~60minPilotcapacity:~6000wafers/aCMOS(sofar)1.0,0.6,0.35,0.18μmprocessesintegrated,mixed-signalcircuitdesignbyIPMS/COMEDDwaferscontract-manufacturedatsiliconfoundryproviders(e.g.,X-FAB)OLED-on-CMOS:DeviceManufacturing/SM-OLED8©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.dePLEDR&DandproductionlineSi-waferØ200mmEtching/SputteringClustex200|LeyboldOpticsSpincoatingEVG120|EVGNitrogenovenMB-OV|MBraunEtching,depositionbythermalevaporationandBarix™thinfilmencapsulationHelisys|ANSKoreaFull-automatedwaferbondingsystemHercules|EVGWaferproberPegasusPA200|WentworthMicroscopesEclipseL200|NikonEllipsometerM-2000U|J.A.WoollamParticlescannerSurfscan7700|KLATencorformermicrodisplayproductionlineofMicroEmissiveDisplaysGermanyGmbH(MED)installedbyMEDatIPMSpremisesinE/2006..B/2007originalproduct:MEDeyescreenME3204(QVGA,RGB)acquiredbyIPMSE/2009OLED-on-CMOS:DeviceManufacturing/P-LED9©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.demicrodisplaysmicrodisplayHMD,mobile/micro-projection,HUD,electronicviewfinder(EVF),...bi-directionalmicrodisplay(display+embeddedcamera)interactiveHMD,opticalinspection,...sensorsopticalsensorsfluorescence,color,flowmetry,photoplethysmography,...embeddedilluminationforimagesensorspatternedilluminationpossibleopticalfinger-print,lab-on-chip,...lightbarriers(reflective)opto-couplerautostereoscopic3Ddisplaysmobiledevices(singleuser,single/multiview)objectsurfaceOLEDCMOSdetectorCMOSsubstrate(wafer)CMOScircuitencapsulationorganic-opto-micro-systemmicro-opticsOLED-on-CMOS:Applications10©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deOLEDmicro-displays11©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.decolourVGA(640x480)OLEDmicro-displayforHMDandmicro-projection24bitparallelvideointerfacecoloroptionsmonochrome(8bit)fullcolour(24bit)digitalpixelcellluminancecontrolbypulsewidth(PWM)color,contrastandgammacorrectioncontrolviaI²C0.18μmCMOSfoundryprocesscoresupply1.8Vdigital1.8VI/OinterfacesnegativeOLEDcathodevoltage(max.-5.5V)activearea7.68x5.76mm²chipsize12x11mm²Highbrightnessupto10,000nitsformonochromegreen(micro-projection)1,000nitsforRGBcolour(HMD)I²Cinterface(configuration)50/60Hzframerate7.7mm5.8mmOLEDmicrodisplay:„HYPOLED“12©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deDemonstratorFull-colorVGAmicrodisplayMediaBox(DVB-T,DVB-H,WLAN)Full-colorVGAmicrodisplayMediaBox„HYPOLED“:Systemintegration13©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deOLEDmicrodisplayhead-mounteddisplay(HMD)micro-projectionoptics(MPU)MediaBox(DVB-T,DVB-H,WLAN)MPU(3-panel)MediaBox„HYPOLED“:Systemintegration14©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deembeddedphotodetectorsCMOSphotodiodeslowerlevelthanOLEDside-by-sidewithactiveelectronicsdevicesemissionanddetectioncanbeoperatedinparallelorsequentiallypossiblyshapingofOLEDemissioncharacteristics(angular,spectralwidth)OLED-on-CMOS:photodetectorintegrationOLEDCMOSdetectorCMOSsubstrate(wafer)CMOScircuitencapsulationmicro-optics15©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deOLED-Microdisplay320x240(QVGA)Embeddedimagesensor160x120(QQVGA)EmbeddedComputersystemOLEDmicro-displaymodeimagesensormodeinvertedcameraimagesystemsetupfeedback-modedemonstratorBi-directionalOLEDmicro-display16©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deBi-directionalOLEDmicrodisplayFeedback-modedemonstratornoimagingopticssofar18©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deHead-mounteddisplay(HMD)application:aimedattrackingtheeyemovementwithrespecttouser'ssight(consciouslyandunconsciously)user's(situation)awareness(unconsciously)gaze-basedhuman-display-interactionvisualInput-/Output-Device(I/O)forpersonalinformationmanagement(PIM)interactiveaugmented-reality(AR)applicationssee-throughopticsrealviewvirtualimagevirtualzoom-inbuttonvirtualzoom-outbuttonvirtualstreetmapinteractionobject53km/hRadioNaviMenüDisplayoff-1°3060www.lumusvision.comHMDcarrierbi-directionalOLEDmicrodisplaymobilehostplatformBi-directionalOLEDmicro-display:HMDapplication19©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deiSTAR:Bi-directionalOLEDmicro-displayiARSee-throughview,display„on“Near-to-eyeprojectionopticsattachedtocommercialsportsgogglesST-PrismandIRsources(eyesceneillumination)“Interactivesee-throughaugmented-realitydisplays”(iSTAR)Fraunhofer-internalcollaborativeproject(WISA)Display:VGA640x480,full-colorembeddedcamera128x96pixelframecamera1280x80pixel20©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deConsumerhead-mountedDisplaysfürSmartphones,mobileTV(3D)electronicviewfinder(EVF)IndustrialHMDOpticalInspectionMedizinHMD,lab-on-chip,functionalmicroscopyAutomotiveHMD,opto-couplerMILST-HMDThermocouplesPartNo.467-854MoreInformationYesNo?SMSby"BOSS":(Wed,05/02/14,18:21)HiPaul,howaboutourmeetingtoday?Haveyoumissedit?Pleasecallbackimmediately!Rgds,BOSS.CALLDELESCOT:5:35SPL:60dBBP:40/105F:23mNHR:93SPLCT:14:21LASMOBf:1kHzMarkets21©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deOutlook22©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deOrganicsMicro-PatterningOLEDMicrodisplayFabricationbyOrthogonalPhotolithography(OLITH)Aimsfull-colorOLEDmicro-displaysw/ocolor-filter(CF)high-resolution(<5μm)highyield(>90%)fast,parallelprocessingscaleableonto8“wafersandbeyondAdvantageshighOLEDefficiency(10x)betterstability(viacolor-specificstackdesign)widenedcolorgamutnocolordiffusionWatersolutionFluoroussolutionOctadecenesolution23©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.decolor-by-colorOLEDmicrodisplayscolorgamutcurrent/powerefficiency,powerconsumptionEnhancedhardware/circuitryintegrationadditional,non-opticalCMOSsensorics(e.g.magnetic)additionalsystemfeaturese.g.,embeddedeye-trackinghigh-luminanceOLEDmicrodisplays(>1000cd/m²)ST-HMDoutdoormicro-projection(ultra-flatopticalmodule)micro-signsnoactiveCMOSsmalldiesizecost-effectivepassive,i.e.,externaldrive/controlveryfinepatterningofemissionarease.g.,signs,7-segmentdisplays,...micro-opticsintegration(incoverglass)beamsteering,shapinghigh-temperatureOLED-on-CMOS(lifetime)..+85..105..125°CNIR-OLEDintegration750..900nm3D+high-res,high-speedemissiveimagesourcenewapplicationssensors1.3mm2μm4μm~60mmOutlook24©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deToolextensiontocombineSM-OLED&P-LEDExtensionof8“P-LEDtoolbySM-OLEDadd2organicevaporationchambersliquidandvaporphaseprocessesinsingleclustertoolhybridOLED(small-molecules+polymers)eBeam,sputterchamberandetcherallownewprocessesforSM-OLEDattractivefor8“wafercustomersduetouniquelargevarietyofprocessesetcher,eBeam,Vitex-TFE,metalevaporation,sputter,organicsevaporationFATQ1..2/’13furtherextensionfeasible25©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deR&Dandpilot-fabricationofOLEDMicrodisplays&Sensorsdesign,processdevelopment/integration,systemintegrationOLEDmicro-displays(QVGA..XGA),bi-directional(displayandimagerinsingledevice,QVGA..SVGA)backplaneCMOSICdesign(insiliconfoundryprocess,0.11..0.6μm)proprietaryOLEDmodule@siliconfoundryOLEDprocessing(SM-OLED&P-LED)systemdesign(e.g.,multimediacontroller)applications(e.g.,head-mounteddisplay)pilotfabricationlinespilotlineOLED-on-CMOS(8”Siwafer)pilotlinePLED-on-CMOS(exMicroEmissiveDisplaysproductionline,8”Siwafer)-Confidential-COMEDD:BusinessUnitOLEDMicrodisplay&Sensors26©FraunhoferIPMSDr.UweVogeluwe.vogel@ipms.fraunhofer.deDr.UweVogelBusinessUnitManagerOLEDMicrodisplaysandSensorsCenterforOrganicMaterials&ElectronicDevicesDresden(COMEDD)FraunhoferInstitutfürPhotonischeMikrosysteme(IPMS)Maria-Reiche-Strasse2D-01109Dresdenphone:+49-351-8823-282email:uwe.vogel@ipms.fraunhofer.deThankstocollaborativepartners:X-FABSemiconductorFoundries;Novaled,FraunhoferIOF,IOSB,IGD;TUDresdenWorkwasinpartssponsoredbyEuropeanCommissionwithintheHYPOLEDproject(High-PerformanceOLED-MicrodisplaysforMobileMultimediaHMDandProjectionApplications,ICT-2007.3.2-217067)FederalMinistryforEducationandResearchoftheGermangovernment(BundesministeriumfürBildungundForschung),BMBF01BK916-919,16SV2283/"ZOOM",16SV3682/"ISEMO"SächsischeAufbaubank(SAB)oftheStateofSaxony(11107/1733)FraunhoferInternalPrograms“iSTAR”,GrantNo.WISA817805(Industry-focusedstrategicalliance)Seeyou!http://www.eetimes.com/electronics-news/4213523/Photo-gallery-Eye-on-innovations-at-ISSCCContact