rfic_hfss螺旋电感设计

Report Create a project File>New Right click project name > rename: Inductor Project > Insert HFSS Design HFSS > Solution Type > Driven Terminal > OK Create 3-D model Modeler > units > um > OK Create Substrate Draw box > input the following parameters Attribute > name: sub > Material > edit > Add material > input the following parameters OK > OK > OK Create Oxide Draw box > input the following parameters Attribute > name: oxide > Material > edit > Add material > input the following parameters OK > OK > OK Create passivation Draw box > input the following parameters Attribute > name: pass > Material > edit > Add material > input the following parameters OK > OK > OK Create air Draw box > input the following parameters Attribute > name: air > Material > vacuum Select air > HFSS > Boundaries > Assign >Radiation Create ground Draw rectangle > input the following parameters Attribute > name: gnd > OK Select gnd > HFSS > Boundaries > Assign > PerfectE > name PerfE gnd Create spiral Select > Add Material > name: rfic_met > Relative Permittivity :2.8e7 > OK > OK Offset Origin > 0, 0, 304.8 Create spiral path > Draw line > following steps of the PDF …… Modeler > Grid Plane > XZ Draw rectangle > input the following parameters Attribute > name > spiral > OK Select Polyline1, spiral > Draw sweep >Along pass Modeler > Grid Plane > XY Create underpass Draw box > input the following parameters Attribute > name: underpass >OK Create via Draw box > input the following parameters Attribute > name: via1 > OK Draw box > input the following parameters Attribute > name: via2 > OK The spiral is shown below Create feed Draw box > input the following parameters Attribute > name: feed > OK CtrlA > HFSS > Mesh Operations > Assign > Inside Selection > Length based > set as below > OK Select material: pec Create ground ring Draw box > input the following parameters Attribute > name: ring Draw box > input the following parameters Attribute > name: inner Select ring and inner > Modeler > Boolean > Subtract > set as below > OK Create extension Draw box > input the following parameters Attribute > name: ring_ext1 > OK Draw box > input the following parameters Attribute > name: ring_ext2 > OK Select ring, ring_ext1, ring_ext2 > Modeler > Boolean > Unite VIEW Create source Draw rectangle > input the following parameters Attribute > name: source1 > OK Draw > rectangle >input the following parameters Attribute > name: source2 > OK VIEW Show all Analyze Result Then choose the analysis set up as the PDF shows to us, analyze all. The results is shown below: We know from the ppt that So, Zin= 2πfL11/Q11+j2πfL11 Let f=0.1GHz, we can see from the picture above that L11=6.1x10^-9, Q11=0.82 So that Zin=4.5+j9.425x10^-8 And we have →Rs,i=4.5ohm Ls,i=9.42x10-8H We plot and in HFSS Using Matlab quadratic fitting choose 5 points on the curve we get w square coefficient is A=556, B=6.27x10^-8 When we get to the resonance freq, we have We have 4 equations for the four unknown quantities now We get that Rsi=627 ohm, Cox=1.518x10^-14 F, Cs,i=1.72x10^-14 F, Cs=5.27x10^-14 F And we have Rs,i=4.5ohm Ls,i=9.42x10-8H before We apply these 6 parameters in the ADS Connect the circuit as below Choose Simulation S-param Add term1 and term2 into the circuit Double click the s-param apply the following set-ups. Click simulate bottom We can get S-parameter plot in the graph window, Insert a rectangular plot > Advanced > enter imag(Z(1,1))/real(Z(1,1)) > OK We get Quality factor Insert rectangular plot > Advanced > enter imag(Z(1,1))/2*pi*freq > OK We get L11 They are similar to the parameters shown above in HFSS.