扫描电镜SEM（英文版ppt）null
Electron Microscopy:
SEM and TEM
Electron Microscopes
SEM TEM
Developed 1960s 1930s
Useful Mag’n Range 20-100,000 1,000-1,000,000
Working Beam Voltage 1 – 30 kV 100 – 1,000 kV
Vacuum High Vacuum always required: there are some low-vac...
null
Electron Microscopy:
SEM and TEM
Electron Microscopes
SEM TEM
Developed 1960s 1930s
Useful Mag’n Range 20-100,000 1,000-1,000,000
Working Beam Voltage 1 – 30 kV 100 – 1,000 kV
Vacuum High Vacuum always required: there are some low-vacuum SEMs (chamber vacuum low)
Samples Large 2-3 mm disc (foils)
Sample Handling Tilts ± 45, Rotation, etc Double tilt stage
Analysis EDX EDX
WDX EELS
Diffraction EBSP/OIM Spot Patterns
Electron Channelling Ps Kikuchi Patterns
Convergent Beam ED
Image Handling Digital Film/Digital
nullnullnullnullnullnullnullnullnullnullCommon Features of Electron Microscopes:
Electron Gun -- Type - Conventional, LaB6,
Field Emission --- Brightness, Stability
Electron Lenses - Aberrations
Vacuum- Conventional Mechanical + Rotary Pump
or UHV.
SEMSEM null
nullSecondary Electron Imagingnullnullnullnullnull
nullnullnullBackscattered Electron ImagingnullnullnullnullOther SEM techniques:
Electron Beam Induced Conductivity (EBIC)
Cathodoluminesence
Electron Backscattter Diffraction (EBSD) SEM Attributes:SEM Attributes:Huge Range of possible Magnifications x20 - x100,000
High Depth of Field
Normal (Secondary Electron) Images are easy to interpret - similar to optical images
Back-scattered Images give information on composition and grain structure
Range of associated techniques such as EBIC, Cathodo-luminescence, hot-cold stages, voltage contrast, EBSDs. etc
Relatively simple to operate
Normally requires a vacuum.
Liquids, oils, solutions, plant & biological cells need to fixed before examination
Can cause beam-damage to sensitive materials
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