iso14644-1

A Reference number ISO 14644-1:1999(E) INTERNATIONAL STANDARD ISO 14644-1 First edition 1999-05-01 Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness Salles propres et environnements maîtrisés apparentés — Partie 1: Classification de la propreté de l'air COPYRIGHTED MATERIAL LICENSED TO NASA (nasa.gov users) (G2222)(137.78.215.178) ON Friday, June 18, 2004 FOR LICENSEE'S USE ONLY. SINGLE USER LICENSE ONLY. COPYING AND NETWORKING PROHIBITED DOCUMENT PROVIDED BY USAINFO.COM. ISO 14644-1:1999(E) © ISO ii Contents Page Foreword ......................................................................................................... iii Introduction ..................................................................................................... iv 1 Scope ........................................................................................................ 1 2 Definitions .................................................................................................. 1 3 Classification ............................................................................................. 3 4 Demonstration of compliance .................................................................... 4 Annexes Annex A (informative) Graphical illustration of the classes of Table 1 ............ 5 Annex B (normative) Determination of particulate cleanliness classification using a discrete-particle-counting, light-scattering instrument ...... 6 Annex C (normative) Statistical treatment of particle concentration data ..... 9 Annex D (informative) Worked examples of classification calculations ........ 10 Annex E (informative) Considerations for the counting and sizing of particles outside the size range applicable for classification ..................... 13 Annex F (informative) Sequential sampling procedure ................................ 15 Bibliography ................................................................................................... 18 Figures Figure A.1 Graphical representation of ISO-class concentration limits for selected ISO classes ............................................................... 5 Figure F.1 Boundaries for pass or fail by the sequential sampling procedure .................................................................................. 15 Tables Table 1 Selected airborne particulate cleanliness classes for cleanrooms and clean zones ........................................................ 3 Table C.1 Student’s t distribution for the 95% upper confidence limit ........... 9 Table F.1 Upper and lower limits for time at which C observed counts should arrive ............................................................................... 16 © ISO 1999 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from the publisher. International Organization for Standardization Case Postale 56 • CH-1211 Genève 20 • Switzerland Internet iso@iso.ch Printed in Switzerland COPYRIGHTED MATERIAL LICENSED TO NASA (nasa.gov users) (G2222)(137.78.215.178) ON Friday, June 18, 2004 FOR LICENSEE'S USE ONLY. SINGLE USER LICENSE ONLY. COPYING AND NETWORKING PROHIBITED DOCUMENT PROVIDED BY USAINFO.COM. © ISO ISO 14644-1:1999(E) iii Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and nongovernmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75% of the member bodies casting a vote. International Standard ISO 14644-1 was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled environments. ISO 14644 consists of the following parts, under the general title Cleanrooms and associated controlled environments: — Part 1: Classification of air cleanliness — Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1 — Part 3: Metrology and test methods — Part 4: Design, construction and start-up — Part 5: Operations — Part 6: Terms and definitions — Part 7: Enhanced clean devices Users should note that the titles listed for parts 2 to 7 are working titles at the time of the release of part 1. In the event that one or more of these parts are deleted from the work programme, the remaining parts may be renumbered. Annexes B and C form an integral part of this part of ISO 14644. Annexes A, D, E, and F are for information only. COPYRIGHTED MATERIAL LICENSED TO NASA (nasa.gov users) (G2222)(137.78.215.178) ON Friday, June 18, 2004 FOR LICENSEE'S USE ONLY. SINGLE USER LICENSE ONLY. COPYING AND NETWORKING PROHIBITED DOCUMENT PROVIDED BY USAINFO.COM. Introduction Cleanrooms and associated controlled environments provide for the control of airborne particulate contamination to levels appropriate for accomplishing contamination-sensitive activities. Products and processes that benefit from the control of airborne contamination include those in such industries as aerospace, microelectronics, pharmaceuticals, medical devices, food, and healthcare. This part of ISO 14644 assigns ISO classification levels to be used for the specification of air cleanliness in cleanrooms and associated controlled environments. It also prescribes the standard method of testing as well as the procedure for determining the concentration of airborne particles. For classification purposes, this part of ISO 14644 is limited to a designated range of considered particle sizes for determination of particle concentration limits. This part of ISO 14644 also provides standard protocols for the determination and designation of cleanli- ness levels that are based on airborne concentrations of particles smaller or larger than the size range designated for classification. This part of ISO 14644 is one of a series of standards concerned with cleanrooms and contamination control. Many factors besides airborne particulate cleanliness must be considered in the design, specification, operation, and control of cleanrooms and other controlled environments. These are covered in some detail in other parts of the International Standards prepared by ISO/TC 209. In some circumstances, relevant regulatory agencies may impose supplementary policies or restrictions. In such situations, appropriate adaptations of the standard testing proce- dures may be required. ISO 14644-1:1999(E) © ISO ivCOPYRIGHTED MATERIAL LICENSED TO NASA (nasa.gov users) (G2222)(137.78.215.178) ON Friday, June 18, 2004 FOR LICENSEE'S USE ONLY. SINGLE USER LICENSE ONLY. COPYING AND NETWORKING PROHIBITED DOCUMENT PROVIDED BY USAINFO.COM. 1 INTERNATIONAL STANDARD © ISO ISO 14644-1:1999(E) 1 Scope This part of ISO 14644 covers the classification of air cleanli- ness in cleanrooms and associated controlled environments exclusively in terms of concentration of airborne particles. Only particle populations having cumulative distributions based on threshold (lower limit) sizes ranging from 0,1 µm to 5 µm are considered for classification purposes. This part of ISO 14644 does not provide for classification of particle populations that are outside of the specified particle size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1 µm) and macroparticles (particles larger than 5 µm) may be used to quantify these populations in terms of U descriptors and M descriptors, respectively. This part of ISO 14644 cannot be used to characterize the physical, chemical, radiological, or viable nature of airborne particles. NOTE The actual distribution of particle concentrations within incre- mental size ranges normally is not predictable and typically is variable over time. 2 Definitions For the purposes of this part of ISO 14644, the following definitions apply. 2.1 General 2.1.1 cleanroom room in which the concentration of airborne particles is con- trolled, and which is constructed and used in a manner to minimize the introduction, generation, and retention of parti- cles inside the room, and in which other relevant parameters, e.g. temperature, humidity, and pressure, are controlled as necessary 2.1.2 clean zone dedicated space in which the concentration of airborne parti- cles is controlled, and which is constructed and used in a manner to minimize the introduction, generation, and retention of particles inside the zone, and in which other relevant parameters, e.g. temperature, humidity, and pressure, are controlled as necessary NOTE This zone may be open or enclosed and may or may not be located within a cleanroom. 2.1.3 installation cleanroom or one or more clean zones, together with all associated structures, air-treatment systems, services, and utilities 2.1.4 classification level (or the process of specifying or determining the level) of airborne particulate cleanliness applicable to a cleanroom or clean zone, expressed in terms of an ISO Class N, which represents maximum allowable concentrations (in particles per cubic metre of air) for considered sizes of particles NOTE 1 The concentrations are determined by using equation (1) in 3.2. NOTE 2 Classification in accordance with this International Stan- dard is limited to the range extending from ISO Class 1 through ISO Class 9. NOTE 3 The considered particle sizes (lower threshold values) applicable for classification in accordance with this International Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness COPYRIGHTED MATERIAL LICENSED TO NASA (nasa.gov users) (G2222)(137.78.215.178) ON Friday, June 18, 2004 FOR LICENSEE'S USE ONLY. SINGLE USER LICENSE ONLY. COPYING AND NETWORKING PROHIBITED DOCUMENT PROVIDED BY USAINFO.COM. ISO 14644-1:1999(E) © ISO 2 Standard are limited to the range from 0,1 µm through 5 µm. Air cleanliness may be described and specified (but not classified) in terms of U descriptors or M descriptors (see 2.3.1 or 2.3.2) for considered threshold particle sizes that are outside of the range covered by classification. NOTE 4 Intermediate ISO classification numbers may be speci- fied, with 0,1 the smallest permitted increment; i.e., the range of intermediate ISO classes extends from ISO Class 1,1 through ISO Class 8,9. NOTE 5 Classification may be specified or accomplished in any of three occupancy states (see 2.4). 2.2 Airborne particles 2.2.1 particle solid or liquid object which, for purposes of classification of air cleanliness, falls within a cumulative distribution that is based upon a threshold (lower limit) size in the range from 0,1 µm to 5 µm 2.2.2 particle size diameter of a sphere that produces a response, by a given particle-sizing instrument, that is equivalent to the response produced by the particle being measured NOTE For discrete-particle-counting, light-scattering instruments, the equivalent optical diameter is used. 2.2.3 particle concentration number of individual particles per unit volume of air 2.2.4 particle size distribution cumulative distribution of particle concentration as a function of particle size 2.2.5 ultrafine particle particle with an equivalent diameter less than 0,1 µm 2.2.6 macroparticle particle with an equivalent diameter greater than 5 µm 2.2.7 fibre particle having an aspect (length-to-width) ratio of 10 or more 2.3 Descriptors 2.3.1 U descriptor measured or specified concentration, of particles per cubic metre of air, including the ultrafine particles NOTE The U descriptor may be regarded as an upper limit for the averages at sampling locations (or as an upper confidence limit, depending upon the number of sampling locations used to character- ize the cleanroom or clean zone). U descriptors cannot be used to define airborne particulate cleanliness classes, but they may be quoted independently or in conjunction with airborne particulate cleanliness classes. 2.3.2 M descriptor measured or specified concentration of macroparticles per cubic metre of air, expressed in terms of the equivalent diameter that is characteristic of the measurement method used NOTE The M descriptor may be regarded as an upper limit for the averages at sampling locations (or as an upper confidence limit, depending upon the number of sampling locations used to character- ize the cleanroom or clean zone). M descriptors cannot be used to define airborne particulate cleanliness classes, but they may be quoted independently or in conjunction with airborne particulate cleanliness classes. 2.4 Occupancy states 2.4.1 as-built condition where the installation is complete with all services connected and functioning but with no production equipment, materials, or personnel present 2.4.2 at-rest condition where the installation is complete with equipment installed and operating in a manner agreed upon by the customer and supplier, but with no personnel present 2.4.3 operational condition where the installation is functioning in the specified manner, with the specified number of personnel present and working in the manner agreed upon COPYRIGHTED MATERIAL LICENSED TO NASA (nasa.gov users) (G2222)(137.78.215.178) ON Friday, June 18, 2004 FOR LICENSEE'S USE ONLY. SINGLE USER LICENSE ONLY. COPYING AND NETWORKING PROHIBITED DOCUMENT PROVIDED BY USAINFO.COM. © ISO ISO 14644-1:1999(E) 3 2.5 Roles 2.5.1 customer organization, or the agent thereof, responsible for specifying the requirements of a cleanroom or clean zone 2.5.2 supplier organization engaged to satisfy the specified requirements of a cleanroom or clean zone 3 Classification 3.1 Occupancy state(s) The particulate cleanliness of air in a cleanroom or clean zone shall be defined in one or more of three occupancy states, viz. “as-built”, “at-rest”, or “operational” (see 2.4). NOTE It should be recognized that the “as-built” state is applicable to newly completed or newly modified cleanrooms or clean zones. Once testing in the “as-built” state is completed, further testing for compliance will be performed in the “at-rest” or the “operational” state, or both. 3.2 Classification number Airborne particulate cleanliness shall be designated by a classification number, N. The maximum permitted concentra- tion of particles, Cn, for each considered particle size, D, is determined from the equation: C Dn N = ×    10 0 1 2 08, , (1) where Cn is the maximum permitted concentration (in parti- cles per cubic metre of air) of airborne particles that are equal to or larger than the considered particle size. Cn is rounded to the nearest whole number, using no more than three significant figures. N is the ISO classification number, which shall not exceed a value of 9. Intermediate ISO classification numbers may be specified, with 0,1 the smallest permitted increment of N. D is the considered particle size, in micrometres. 0,1 is a constant, with a dimension of micrometres. Table 1 presents selected airborne particulate cleanliness classes and the corresponding particle concentrations for particles equal to and larger than the considered sizes shown. Figure A.1 (see annex A) provides a representation of the OSI noitacifissalc (rebmun N) m/selcitrap(stimilnoitartnecnocmumixaM 3 regraldnaotlauqeselcitraprof)riafo nidetaluclacerastimilnoitartnecnoc(wolebnwohssezisderedisnocehtnaht )2.3ni)1(noitauqehtiwecnadrocca 1,0 µm 2,0 µm 3,0 µm 5,0 µm 1 µm 5 µm 1ssalCOSI 01 2 2ssalCOSI 001 42 01 4 3ssalCOSI 0001 732 201 53 8 4ssalCOSI 00001 0732 0201 253 38 5ssalCOSI 000001 00732 00201 0253 238 92 6ssalCOSI 0000001 000732 000201 00253 0238 392 7ssalCOSI 000253 00238 0392 8ssalCOSI 0000253 000238 00392 9ssalCOSI 00000253 0000238 000392 eromonhtiwatadnoitartnecnoctahteriuqerssecorptnemerusaemehtotdetalerseitniatrecnUETON levelnoitacifissalcehtgninimretednidesuebserugiftnacifingiseerhtnaht Table 1 — Selected airborne particulate cleanliness classes for cleanrooms and clean zones COPYRIGHTED MATERIAL LICENSED TO NASA (nasa.gov users) (G2222)(137.78.215.178) ON Friday, June 18, 2004 FOR LICENSEE'S USE ONLY. SINGLE USER LICENSE ONLY. COPYING AND NETWORKING PROHIBITED DOCUMENT PROVIDED BY USAINFO.COM. ISO 14644-1:1999(E) © ISO 4 selected classes in graphical form. In case of dispute, the concentration Cn as derived from equation (1) shall serve as the standard value. 3.3 Designation The designation of airborne particulate cleanliness for clean- rooms and clean zones shall include: a) the classification number, expressed as “ISO Class N ”; b) the occupancy state to which the classification applies; c) the considered particle size(s), and the related concen- tration(s), as determined by the classification equation (1) where each considered threshold particle size is in the range from 0,1 µm through 5 µm. Example designation: ISO Class 4; operational state; considered sizes: 0,2 µm (2 370 particles/m3), 1 µm (83 particles/m3) The considered particle size(s) for which the concentra- tion(s) will be measured shall be agreed upon by the custom- er and the supplier. If measurements are to be made at more than one considered particle size, each larger particle diameter (e.g., D2) shall be at least 1,5 times the next smaller particle diameter (e.g., D1). e.g.: D2 ≥ 1,5 x D1 4 Demonstration of compliance 4.1 Principle Compliance with air cleanliness (ISO class) requirements specified by the customer is verified by performing specified testing procedures and by providing specified documentation of the results and conditions of testing, as agreed upon by the customer and the supplier. 4.2 Testing The reference test method for demonstrating compliance is given in annex B. An alternative method having comparable accuracy may be specified, although if no method is specified or agreed upon, the reference method shall be used. Tests performed to demonstrate compliance shall be con- ducted using calibrated instruments. 4.3 Airborne particle concentration limits Upon completion of testing in accordance with 4.2, average particle concentrations and the 95% upper confidence limit (when applicable) shall be calculated using equations shown in annex C. Average particle concentration(s), calculated in accordance with equation (C.1), shall not exceed the concentration limit(s) determined by use of equation (1) in 3.2, as specified [3.3 c)] for the considered size(s). In addition, for situations in which the number of sampling locations involved is at least two but not more than nine, the calculation of 95% upper confidence limits in accordance with C.3 shall not exceed the concentration limits established above. NOTE Worked examples of classification calculations are provided in annex D. Particle concentrations used for determination of conformance to classification limits shall be measured by the same method for all considered particle sizes. 4.4 Test report The results from testing each cleanroom or clean zone shall be recorded and submitted as a comprehensive report, along with a statement of compliance or n