Assembly and Testing of a MEMS Mirror for Endoscopic OCT

Assembly and Testing of a MEMS Mirror for Endoscopic OCTnullAssembly and Testing of a MEMS Mirror for Endoscopic OCTAssembly and Testing of a MEMS Mirror for Endoscopic OCT IMSURE Fellow: Dolly Creger Mentor: William Tang Graduate Student: Jessica Ayers nullDefinitionsMicroelectromechanical Systems (MEMS)- m...

nullAssembly and Testing of a MEMS Mirror for Endoscopic OCTAssembly and Testing of a MEMS Mirror for Endoscopic OCT IMSURE Fellow: Dolly Creger Mentor: William Tang Graduate Student: Jessica Ayers nullDefinitionsMicroelectromechanical Systems (MEMS)- micron-scale devices linking mechanical parts to electrical components. Optical Coherence Tomography (OCT)- Imaging technology which uses infrared light to image cross-sections of biological tissue with micron scale resolution. Chemical Vapor Deposition (CVD)- A process in which a controlled chemical reaction produces a thin surface film. Photoresist- A light sensitive coating that is used to transfer the image of a mask onto the surface of a wafer, followed by a reactive ion etch (RIE). Stiction- The surface tension of liquid on MEMS components. Shear Mode Quartz- A piezoelectric effect in a lateral plane. Realm of Biomedicine Realm of Biomedicine Coronary Restenosis Laryngeal cancer, Barrett’s Esophagus. OCT for noninvasive techniques for cancer screening. Majority of research lies in linear OCT. Trachea, GI Tract, or blood vessels require a rotary laser beam. 360º rotating devices are currently limited by the size of the motor. Fig 2. coronary artery restenosis www.lightlabimaging.com Fig 3. Mouse Trachea www.lightimaging.comFig 1. coronary artery comparison www.lightimagin.comnullWe are working on a different kind of micromachine…nullSimple Micro MachineSimple Micro MachineFig 4. SEM Image: Dolly CregerOur ProjectOur ProjectDevelop a smaller 360º rotating mirror that can fit inside a 1 mm diameter probe. This will cut the size of the current rotating devices in half. Endoscopic ProbeEndoscopic ProbeFig 5. Conceptual drawing of endoscopic probe. Jessica Ayers UCIFabrication Commercial PolyMUMPs ProcessFabrication Commercial PolyMUMPs ProcessnullL-Edit592 µm x 527 µm990 µm x 941 µmnullStictionFig 4 and 5. Mirror Assembly Jessica Ayers UCIMirrorAssemblyScratch DriveScratch DriveFig 6 and 7. Scratch Drive Array Jessica Ayers UCIElectrothermal Actuators Microvibromotors, Electrostatic Micro Conveyer, Dipole Surface Drive Microengine Electrostatic Linear Inchworm Motors Ultrasonic/Magnetic Actuators 520 µm diameter876 µm diameternull Stepping motion of the SDA: Electrostatic load deflects the plate. Bushing is scratched forward. Voltage is reduced and the plate is pulled forward. ResultsResultsScratch Drive: ~200V .5-1.5 Hz Stiction a. Evaporation b. Instantaneous vaporization c. Leave submerged Assembly a. Probe Station b. Microspatula c. Magnetism Future WorkFuture WorkStiction Continuous laser to vaporize all the liquid instantaneously Backside Etching Shear Mode Quartz Assembly Thicker Ni Coating Photoresist Hinges Fig 8. Absorption of silicon and water, Jessica Ayers UCISpecial Thanks!Special Thanks!National Science Foundation UROP-IMSURE Said Shokair Jerry McMillan UCI INRF Goran Matejasevic Professor Willliam TangnullJessica Ayers Charlie Wen Gloria Yang Le "Yanni" Yan

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Assembly and Testing of a MEMS Mirror for Endoscopic OCT

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