七星流量计 D08-1F-1FP-1FM 使用手册

D08-1F、D08-1FP、D08-1FM 型 流 量 显 示 仪 使 用 手 册 版本 2 0 1 0 . 0 4 使用须知 尊敬的用户，感谢您购买本公司生产的 D08 系列流量显示仪。本手册详细叙述了正确、 安全使用该系列产品的必要事项。 产品使用者，请务必认真参阅本手册并理解后使用，在使用过程中，请注意带有 标 志的文字及注意事项中包含的所有 内容 财务内部控制制度的内容财务内部控制制度的内容人员招聘与配置的内容项目成本控制的内容消防安全演练内容 。 对于未按照使用手册使用造成的财产损失或人身伤害，本公司有权不承担责任。 本手册对您安装、维护及故障维修时，必不可少，请妥善留存保管。 目 录 1. 用途和特点 ······································································································································· 1 2. 主要技术指标 ··································································································································· 2 3. 外观和操作面板 ······························································································································· 2 4. 结构说明 ············································································································································ 3 4.1 ±15V 电源 ···························································································································· 3 4.2 基准源和流量设定 ················································································································ 4 4.3 数字显示器 ···························································································································· 4 4.4 阀控开关 ······························································································································· 4 4.5 调零电位器 ···························································································································· 4 4.6 1FP 型的设定显示功能 ········································································································· 4 5. 安装和接线 ······································································································································· 4 5.1 外形和开孔尺寸 ···················································································································· 5 5.2 安装 ······································································································································· 5 5.3 1F、1FP 型接线 ···················································································································· 6 5.4 1FM 型接线 ··························································································································· 8 5.5 保护板的安装 ························································································································ 8 5.6 MFC/MFM 信号接线图 ········································································································· 9 6. 操作方法 ············································································································································ 9 7. 参数设置 ·········································································································································· 10 7.1 流量单位指示的改变 ·········································································································· 10 7.2 小数点位置改变 ·················································································································· 11 7.3 显示量程的改变 ·················································································································· 11 8. 注意事项 ·········································································································································· 12 9. 选型与订货规格填写 ····················································································································· 13 D08 SERIES FLOW READOUT BOXES 第 1 页 共 13 页 D08-1F、D08-1FP、D08-1FM 型 流 量 显 示 仪 1. 用途和特点 流量显示仪用于为气体质量流量控制器（MFC）和质量流量计（MFM）提供工作电源、 操作控制、流量设定和流量数字显示等。D08 系列流量显示仪可直接与我公司生产的 D07 系列 MFC（或 MFM）配套使用。同时原则上也可以与世界上其它型号的 MFC（或 MFM） 配合使用。 D08-1F、1FM、1FP 型流量显示仪采用小型塑料机壳，体积较小，便于安装。流量输 入输出信号，除了具有 标准 excel标准偏差excel标准偏差函数exl标准差函数国标检验抽样标准表免费下载红头文件格式标准下载 的 0~+5V 电压信号外，还有 4~20mA 或 0~10mA 的电流信号。 D08-1F 型流量显示仪带有流量设定和阀控功能，可与工作电源为±15V 的 MFC（或 MFM）配套使用。D08-1FP 型流量显示仪则在 D08-1F 型流量显示仪的基础上增加了设定 显示功能。 D08-1FM 型无流量设定和阀控功能，专为工作电源为±15V 的 MFM 配套使用。 图 1. 流量显示仪与质量流量控制器配套使用 第 2 页 共 13 页 2. 主要技术指标 表 关于同志近三年现实表现材料材料类招标技术评分表图表与交易pdf视力表打印pdf用图表说话 pdf 1. D08-1F、D08-1FP、D08-1FM 型流量显示仪技术指标 编号 项 目 D08-1F、D08-1FP D08-1FM 1 输出电源 +15V±3% 400mA -15V±3% 400mA 2 基准源 +5.00V±0.1% 5mA 3 供电电源 ~85-265V 50/60Hz 4 最大功耗 15 W 5 输入输出信号 电压信号： 0 ~ +5V 电流信号： 4~20mA (或 0~10mA) 输出电压： 0 ~ +5V 输出电流： 4~20mA (或 0~10mA) 6 外形尺寸 96×96×157 mm 7 控制通道 1 路 MFC 1 路 MFM(无设定和阀控) 8 抗电磁干扰 通过 CE 认证 9 重量 1 Kg 3. 外观和操作面板 三种型号的流量显示仪均采用标准嵌装式塑料机箱，外观和操作面板见图 2～4。 图 2. 1F 型流量显示仪外观 调零电位器 阀控开关 流量单位指示 流量显示窗 设定电位器 第 3 页 共 13 页 图 3. 1FP 型流量显示仪外观 图 4. 1FM 型流量显示仪外观 4. 结构说明 4.1 ±15V 电源 1F、1FP、1FM 型显示仪的电源采用开关电源，具有工作电源电压范围宽和抗干扰能 力强的特点。集成稳压模块内部有过热、过流保护，且具有性能稳定、可靠性高等特点。 显示选择开关 第 4 页 共 13 页 4.2 基准源和流量设定 在 1F 和 1FP 型流量显示仪中设计有+5.00V 基准电源，它加载到设定电位器上，通过 操作者手动调节面板上的设定电位器，提供 0~5.00V 的设定电压输出，用来控制 MFC 的 流量。该电源设计有开机软启动电路，当显示仪接通电源时，基准源缓慢从 0V 升至+5.00V， 软启动时间约为 20 秒。 4.3 数字显示器 显示器用来显示流量，采用三位半数字面板表直读，最大显示数为 1999。流量显示的 单位有“SCCM”、“SLM”、“%”三种。通常，流量显示仪与 MFC（或 MFM）配套出厂 时,将显示器显示的量值和单位与其对应的 MFC（或 MFM）通道的量值和单位调整成一致。 若用户订货时没有注明 MFC（或 MFM）的流量规格，则出厂调整为按满量程的百分比显 示，它与任何规格的 MFC（或 MFM）配合使用时，满量程均显示“100.0%”。在流量显 示仪的面板上，设计有流量单位指示灯，当代表各自单位的发光二极管亮时表示流量是 SCCM 或 SLM，若两个均不亮，表示单位为%。各通道显示的数值、小数点和流量单位均 可通过改变和适当调整而满足使用的不同要求。 4.4 阀控开关 1F 和 1FP 型流量显示仪的面板上装有“阀控”开关。阀控开关有三个位置，正常工作 时置于“阀控”位，需要通气吹洗管路时，置于“清洗”位，不用时应置于“关闭”位。 4.5 调零电位器 面板上设计有外“调零”电位器，可以用来在小范围内调整 D07 系列 MFC（或 MFM） 产品的零点。 4.6 1FP 型的设定显示功能 1FP 型流量显示仪比 1F 型流量显示仪增加了设定显示功能。将面板的显示选择开关拨 至“设定显示”，数字显示器显示 MFC 的设定流量；将显示选择开关拨至“流量显示”， 则显示 MFC 的实际流量。 5. 安装和接线 第 5 页 共 13 页 5.1 外形和开孔尺寸：见图 5。 关闭阀控清洗 ％ 图 5. 1F、1FP、1FM 型流量显示仪机壳外形尺寸 5.2 安装： 5.2.1 用于面板嵌入安装的附件包括长支架、鞍形支架和螺钉各两个，如图 6 所示。它们分别用于 从显示仪上下两侧进行固定。 图 6. 1F、1FP、1FM 型流量显示仪附件 5.2.2 将长支架插入显示仪外壳上下两侧的长方形沟槽内，两端弯曲处朝上，如图 7 所示。 图 7. 插入长支架 安装开孔尺寸： 91.5×91.5 第 6 页 共 13 页 5.2.3 将鞍形支架插入长方形沟槽后部的孔中，如图 8 所示。 图 8. 插入鞍形短支架 5.2.4 将螺钉穿过长支架后弯板的圆孔，旋入鞍形支架的螺纹孔。拧紧螺钉，使长支架的前弯板和 显示仪外壳前端的后檐紧紧夹住面板，达到固定显示仪的目的。如图 9 所示。 A.穿入螺钉 B.旋紧螺钉 C.夹紧面板 图 9. 将显示仪固定在面板上 5.3 1F、1FP 型接线 1F 和 1FP 型流量显示仪的电源线和外控信号端子，见图 10。 1F 型和 1FP 型流量显示仪，除了能提供 0~+5V 的电压输入输出信号之外，还具有电 流输入输出功能。可以通过后部接线端子的跳线，改变输入功能。 通常出厂时，显示仪接线为“内设”方式，见图 10a，将“设定”与“内设”线短连， 通过面板上的设定电位器调节流量。 第 7 页 共 13 页 当接线端子上的“设定”与“内设”的连线断开，则仪表处于“电压设定”的“外设” 状态，由用户自己提供的（计算机数模转换器）0~+5.00V 电压接入“设定”和“信号地” 两端，作为外部设定信号来调节流量。参见图 10b，也可以外接一个设定转换开关，进行 内外设定的转换。 当接线端子上的“设定”与“电流设定”短连，参见图 10c，则仪表处于“电流设定” 状态，由“电流输入”端子输入的 4~20mA（或 0~10mA）信号调节流量。 无论仪表在电流设定还是电压设定状态，能同时输出电压和电流信号。“流量检测”端 子相对“信号地”输出 0~+5V 流量信号；“电流输出”端子输出 4~20mA（或 0~10mA）的 流量信号。输入输出电流的形式，是 4~20mA 还是 0~10mA，可根据用户订货的要求，在 出厂时调定，并在机壳后铭牌上的电流信号复选框上勾选。 图 10. D08-1F/1FP 型背视接线图 c.“电流设定” 接线图 a. “内设”接线图 b. 内外“电压设定”转换接线图 信 号 地 电流设定 设 定 内 设 流量检测 信号地 0~+5V D/A 转换器 外 内 设定转换开关 信 号 地 电流设定 设 定 内 设 流量检测 电流输出 ~85-265V 信 号 地 电流输入 流量检测 地 阀 控 内 设 电流设定 设 定 信 号 地 MFC 信 号 地 ~85-265V 第 8 页 共 13 页 5.4 1FM 型接线 D08-1FM 型流量显示仪的电源线和输出信号接线端子，见图 11。 图 11. D08-1FM 型 背视接线图 5.5 保护板的安装：接线完毕，将附件中的保护板用自攻螺钉固定到后面板上方。如图 12 所示。 图 12. 保护板安装示意图 MFM 电流输出 信 号 地 信 号 地 流量检测 地 ~85-265V ~85-265V 第 9 页 共 13 页 5.6 MFC/MFM 信号接线图 图 13. MFC/MFM 信号插座和接线 6. 操作方法 流量显示仪与 MFC（或 MFM）连接后的详细操作说明，可参见 D07 系列 MFC（或 MFM）的有关技术说明书。 6.1 开机：接通电源，则仪表开始工作（1F、1FP、1FM 型无电源开关，将外部电源接通即可）。 1F/1FP 型 MFC 信号 No. 特 性 1 外调零 2 3 电源地 4 设定 5 阀控 6 信号地 7 流量检测 8 地 9 10 11 -15V 12 -15V 13 14 公共地 15 +15V 1FM 型 MFM 信号 No. 特 性 1 外调零 2 3 电源地 4 5 6 信号地 7 流量检测 8 地 9 10 11 -15V 12 -15V 13 14 公共地 15 +15V 1 8 9 15 第 10 页 共 13 页 6.2 MFC（或 MFM）调零：开机预热 15 分钟以后，在不通气的情况下，可以使用小改锥调整 显示仪面板上的“调零”电位器，对 MFC（或 MFM）调零。 6.3 阀控开关有三个位置，正常工作时置于“阀控”位（1FM 型无此操作）。 6.4 流量内设定信号由面板上的十圈电位器调节（1FM 型无此操作）。 6.5 关机：切断外接电源即可关机。 7. 参数设置 输出电流信号、流量单位指示和量程要根据用户要求和所配的 MFC（MFM）来设置， 通常由厂家在出厂前配好。若用户在使用中要自己改变量程和单位，可以打开流量显示仪 外罩，对转换板上的有关拨动开关和电位器进行调整，拨动开关和电位器位置参见图 14。 图 14. 拨动开关和调整电位器位置图 7.1 流量单位指示的改变 “SCCM、SLM、%”流量单位改变的拨动开关位置见图 15。 图 15. 流量单位指示改变的拨动开关位置图 RP3 S3-1,3-2 S4-1,4-2,4-3,4-4 on 1 2 S3-1 S3-2 SCCM: S3-1—on S3-2—off on 1 2 S3-1 S3-2 % : S3-1—off S3-2—off on 1 2 S3-1 S3-2 SLM: S3-1—off S3-2—on 第 11 页 共 13 页 7.2 小数点位置改变 流量显示小数点位置可以通过拨动开关 S4 来改变，见图 16。 图 16. 小数点改变对应的拨动开关位置图 7.3 显示量程的改变 显示器显示量程的改变包括显示的有效数据和小数点的改变，小数点位置的改变方法 见 7.3 条，显示有效数值的改变按以下步骤进行。 a. 切断电源，取下 MFC/MFM 插头和电源线，（取下“设定”与“内设”的短连线）打开外 壳。 b. 如果是改变 1FM 型流量显示仪的量程，可从后面板接线端子上的“流量检测”和“信号地” 两端输入+5.00V 电压；如果是改变 1F 型或 1FP 型流量显示仪的量程，可将后面板接线端子 上的“流量检测”和“内设”端子用导线短路，并将前面板上的设定电位器顺时针旋转到最 大值（使内设输出电压为满量程值+5.00V）。 c. 接通显示仪电源，20 秒钟后，观察前面板上数字显示器的显示值，用小一字螺丝刀调节电 位器 RP3（见图 10）使显示器显示的数值与对应的 MFC/MFM 通道的满量程值一致（注意 对应 3-1/2 位数字电压表，显示的数据范围是 0~1999，同时注意小数点的位置要匹配）。 d. 切断电源，对于 1FM 型流量显示仪，要断开外接+5.00V 电压；对于 1F 型和 1FP 型流量显 示仪，要断开“流量检测”和“内设”的短连导线。 e. 量程调整结束，装上外壳，恢复“设定”与“内设”的短连线，就可以正常使用了。 on DIP 1 2 3 4 S4-1 S4-2 S4-3 S4-4 显示“100.0”的 DIP 开关位置 DP1 流量显示器 DP2 DP3 DP3 DP2 DP1 第 12 页 共 13 页 8. 注意事项 8.1 禁止项 仪表盒内部的电位器在出厂前均已调整好，用户不得随意自行调整。15V 电源的功率 有限，用户不能超负荷使用。 8.2 改量程注意 非专业维修人员和电器技术人员，不能进行显示量程的改变和调整。在打开外壳和接 通电源时要特别注意安全。 8.3 更换保险丝 1F、1FP、1FM 型流量显示仪的电源保险器在仪表盒内，如遇该显示仪通电后没有显 示，可检查是否保险丝断。这时需松开仪表盒下面的螺钉，取下外壳，更换熔断丝管。 8.4 接地问题 流量显示仪的外壳（电源地）与 MFC（或 MFM）的外壳，原则上应一点接地，共一 个同等的地电位。如果二者相距较远，机壳与各自机柜地相连，则应考虑将显示仪与 MFC （或 MFM）连接电缆中的地线断开，否则可能出现地线干扰，甚至出现地线烧毁事故。 如果 MFC（或 MFM）和显示仪使用在高频发生器的环境中发现有干扰，可以考虑将显示 仪交流电源输入线中的“地”（GND）线断开，以减小干扰。 8.5 产品替换 如果用本流量显示仪与世界上其它型号的 MFC（或 MFM）连接使用，要注意电源的 容量是否匹配，要注意正确配线和转接。特别要注意的是本机的阀控功能与其它型号产品 可能不兼容，需要进行改线或不接。 第 13 页 共 13 页 9 选型与订货规格填写 9.1 显示仪选型表 9.2 标准订单填写格式 D08- [t] - [o] - [s] [t] – Type 型号 1F/1FP /1FM [o] –I/O signal 输入/输出信号 -[C] 0－5VDC 和 4－20mA -[A] 0－5VDC 和 0－10mA [s] – Special request特殊要求 -[-] 百分比显示(100.0)，中文标签。 -[S] 给出显示对应的量程（见右侧的对应关系 表），并注明其他要求。 量程 代表字母 量程 代表字母 5sccm A 5slm N 10sccm B 10slm P 20sccm C 20slm Q 30sccm D 30slm R 50sccm E 50slm U 100sccm F 100slm V 200sccm G 150slm W 300sccm H 200slm X 500sccm J 250slm Y 1slm K 300slm Z 2slm L 百分比显示 S 3slm M 适用范围 电路类型 外形 显示类型 输入电源 输出电源 扩展功能 产品型号 MFC MFM 模拟 产品 数字 产品 嵌入式 仪表 塑壳 台式 豪华 机箱 上架式 型材 机箱 单通道 单显示 多通道 单显示 多通道 多显示 ~110 VAC ~220 VAC ~85 -265 VAC ±15 VDC +24 VDC 4~20mA/ 0~10mA 电流输入 4~20mA/ 0~10mA 电流输出 4~20mA / 1~5V 输入信号 4~20mA / 1~5V 输出信号 RS232/ RS485 通讯 设定 显示 流量 积算 1F √ √ √ √ √ √ √ √ √ 1FM √ √ √ √ √ √ √ 1FP √ √ √ √ √ √ √ √ √ √ 1/2/4 √ √ √ √ √ √ √ 2F/3F/4F √ √ √ √ √ √ √ √ 2B/3B/4B 2E/3E/4E √ √ √ √ √ √ √ 1K √ √ √ √ √ √ √ √ 1~5V 1G √ √ √ √ √ √ √ √ 1GM √ √ √ √ √ √ √ 8C √ √ √ √ √ √ √ √ √ 8CM √ √ √ √ √ √ √ √ D08 系列 流量显示仪 北京七星华创电子股份有限公司 质量流量计分公司 (北京七星弗洛尔电子设备制造有限公司制造） 地 址： 北京市朝阳区酒仙桥东路 1 号 通讯地址： 北京 741 信箱 3 分箱 邮政编码： 100015 联系电话： +86-10-64362939 64362925 +86-10-64361831—8491/8315 传 真： +86-10-64362923 网 址： http://mfc.sevenstar.cn 电子信箱(E-mail): mfcsales@sevenstar.com.cn 乘车路线： 乘地铁到东直门, 换乘 401 路公共汽车，到陈各庄下车或 乘地铁到农业展览馆，换成 516 路公共汽车，到酒仙桥东路北口下车 上海办事处: 上海闸北区天目西路 547 号联通国际大厦 1916室(200070) 电 话: +86-21-33030324 传 真: +86-21-63533265 深圳办事处: 深圳市福田区振华路 45号汽车大厦 B712（518031） 电 话: +86-755-88290258 传 真: +86-755-88294770 *公司承诺不断提升产品品质，保 留在不经 通知 关于发布提成方案的通知关于xx通知关于成立公司筹建组的通知关于红头文件的使用公开通知关于计发全勤奖的通知 的情况下对此手册 所含信息进行修改的权力。 *本手册内容，已经严格审校，如 有错误或遗漏，劳请及时告知。 *七星电子 版权所有 D08-1F, D08-1FP, D08-1FM Flow Readout Box INSTRUCTION MANUAL A NOTE TO OUR CUSTOMERS Dear customer, Thank you for purchasing SEVENSTAR D08 series Flow Readout Boxes. This user manual is important when installing and doing maintenance. Please keep it carefully. We strongly recommend that you read this manual thoroughly before you starting to use the product. This user manual introduces the important issues including the proper and safe use of the products. And please notice the words and section with the symbol . Not in accordance with the user manual for the use of property caused by loss or personal injury, SEVENSTAR may not be responsible. If you require any additional information or assistant of Sevenstar D08 series Flow Readout Boxes. Please feel free to contact your local Sevenstar Sales Agent or Sevenstar Customer Service at: (8610)- 6436 2925. Yours sincerely, Sevenstar CONTENTS 1. APPLICATIONS & FEATURES ·································································································· 1 2. SPECIFICATIONS ························································································································· 2 3. APPEARANCES & OPERATING PANEL ················································································ 2 4. STRUCTURE INSTRUCTION ···································································································· 4 4.1 ±15V Power Supply ·············································································································· 4 4.2 Nominal Power Supply & Flow Setting··················································································· 4 4.3 Displayer ································································································································ 4 4.4 Valve Controller ····················································································································· 4 4.5 Zero Potentiometer ················································································································· 4 4.6 D08-1FP Set point display ······································································································ 4 5. INSTALLATION & CONNECTION ··························································································· 4 5.1 Dimension ······························································································································ 5 5.2 Installation······························································································································ 5 5.3 D08-1F&1FP Connection ······································································································· 6 5.4 D08-1FM Connection ············································································································· 8 5.5 Protection Board ····················································································································· 8 5.6 MFC/MFM“D” Connector ······································································································ 9 6. OPERATION INSTRUCTIONS ··································································································· 9 7. PARAMETER SETTING ············································································································ 10 7.1 Flow Unit Change················································································································· 10 7.2 Radix Point Modifying ········································································································· 11 7.3 Displayed Range Adjustment ································································································ 11 8. CAUTION ······································································································································· 12 9. TYPE SELECTION ······················································································································ 13 D08 SERIES FLOW READOUT BOXES Page 1 of 13 Operating Instruction 1. APPLICATIONS & FEATURES Flow Readout Boxes provide operating power supply, operating control, flow setting and flow digital display for the mass flow controller (MFC) and the mass flow meter (MFM). D08 series of Flow Readout Boxes can be connected with D07 series MFC or MFM without any change. And, it can also be used for other models of MFC or MFM. With mini-style of plastic chassis, due to the small volume, D08-1F, 1FP, 1FM are quite convenient to be installed. Besides the standard 0~+5V signal, there are 4~20mA or 0~10mA current signals of flow input & output signals. D08-1F Flow Displayer have functions of flow setting and valves drive, it could be operated together with MFC or MFM. Besides the same function as D08-1F, D08-1FP Flow Displayer also has function of set point display. D08-1FM do not have flow setting and valves drive functions, which is ONLY used with MFM. Figure 1. Displayer & MFC Page 2 of 13 2. SPECIFICATIONS Table 1. Specifications of D08-1F, D08-1FP, D08-1FM Flow Readout Boxes No. Items D08-1F&1FP D08-1FM 1 Output Power Supply +15V±3% 400mA -15V±3% 400mA 2 Nominal Power Supply +5.00V±0.1% 5mA 3 Power Supply ~85－265 VAC 50/60 Hz 4 Max Consumption 15 W 5 Output & Input Signal Voltage Signal: 0 ~ +5V Electric Signal: 4~20mA (or 0~10mA) Output Voltage: 0 ~ +5V Output Current: 4~20mA (or 0~10mA) 6 Dimension(mm) 96×96×157 7 Control Channels 1 MFC/MFM 1 MFM (Without Valve Drive & Setting) 8 EMC Pass CE certificate 9 Weight(kg) 1 3. APPEARANCE & OPERATION PANEL Three models of Flow Readout Box are all applied standard inlay plastic chassis, its appearances and operation panels are showing in figure 2-4. Figure 2. 1F Flow Readout Box Zero Valve controller Flow Unit Indication Displayer Set Page 3 of 13 Figure 3. 1FP Flow Readout Box Figure 4. 1FM Flow Readout Box Display Selection Page 4 of 13 4. STRUCTURE INSTRUCTION 4.1 ±15V Power Supply Composed by switching modules, the AC power supply has wide input voltage and strong anti-jamming. With over-heat and over load protection, the output voltage ±15VDC has high stability and reliability. 4.2 Nominal Power Supply and Flow Setting From the +5.00V nominal power supply, the 0~5V voltage output which is adjusted by its set potentiometer can be used for controlling MFCs. Because of the soft-start circuit, the voltage will rise gradually from 0 to +5V for avoiding the overshoot of MFC. The time of soft-start will cost 20 seconds approximately. 4.3 Displayer 3 and 1/2 numbers panel can display the readout from MFC (The maximum value: 1999). Flow rate can be displayed by “SCCM”, “SLM” or “%FS”. No