FX-76S_86S

LCD Scanners 7th and 8th Generation Large Plate Size Applications Deliver Higher Productivity and Enhanced Exposure Stability FX-76S/86S All of the products in this brochure are under export restriction. The export of these products is controlled by Japanese Foreign Exchange and Foreign Trade and International export control regime. They shall not be exported without authorization from the appropriate government authorities. WARNING TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT. 7th and 8th Generation Large Plate Size Applications Deliver Higher Productivity and Enhanced Exposure Stability LCD Scanners FX-76S/86S • Multi Lens System Both models feature the Multi Lens System consisting of multiple projection lenses. This design enables a wide exposure field and excellent resolution. • High Throughput FX-76S (1950 mm × 2250 mm): 514 panels/hr (42-inch wide panels), 385 panels/hr (48-inch wide panels) FX-86S (2200 mm × 2500 mm): 496 panels/hr (46-inch wide panels), 372 panels/hr (52-inch wide panels) • Improved Exposure Performance The FX-76S/86S employ a new high-precision calibration function initially developed for the 10th generation LCD scanner FX-101S, and provide enhanced exposure stability performance. • Excellent Resolution The Multi Lens System paired with the proprietary Nikon focus control system ensures excellent resolution of 3 μm (L/S) across the entire plate. • Optimal Alignment Accuracy Alignment accuracy of ±0.6 μm or less is achieved using simultaneous multipoint alignment with the ultra precise stage. Main Features Specifications The FX-76S/86S are for 7th and 8th generation large plate size applications. These LCD scanners support the production of large LCD panels using large plates. With their improved productivity and stable exposure performance, they contribute to volume production of large, high-definition LCD panels. Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. Products and brand names are trademarks or registered trademarks of their respective companies. March 2012. ©2012 NIKON CORPORATION http://www.nikon.co.jp/pec NIKON CORPORATION Precision Equipment Company LCD Equipment Division Sales Dept. Shin-Yurakucho Bldg., 12-1, Yurakucho 1-chome, Chiyoda-ku, Tokyo 100-8331, Japan Tel: +81-3-3216-1007 Fax: +81-3-3216-1059 NIKON PRECISION INC. 1399 Shoreway Road, Belmont, CA 94002-4107, U.S.A. Tel: +1-(650)-508-4674 Fax: +1-(650)-508-4600 NIKON PRECISION EUROPE GmbH Robert-Bosch-Strasse 11, D-63225 Langen, Germany Tel: +49-6103-973-0 Fax: +49-6103-973-333 NIKON PRECISION KOREA LTD. 17-24 Singal-Dong, Giheung-Gu, Yongin-Si, Gyeonggi-Do, Korea Tel: +82-31-288-5601 Fax: +82-31-288-5609 NIKON PRECISION TAIWAN LTD. 3F-1, 2, 3, 5 No. 28, Tai Yuen Street, Chu Pei City, Hsih Chu Hsien, Taiwan Tel: +886-3-552-5888 Fax: +886-3-552-5858 NIKON PRECISION SINGAPORE PTE LTD. 29 Woodlands Industrial Park E1, Northtech Lobby 3 #4-17, Singapore 757716 Tel: +65-6367-4020 Fax: +65-6367-4021 NIKON PRECISION SHANGHAI CO., LTD. RM. 601 Xin Jin Qiao Tower, No. 28 Xin Jin Qiao Road, Pudong New District, Shanghai 201206 China Tel: +86-21-5899-0266 Fax: +86-21-5899-1660 This product was developed and manufactured in the factory certified under ISO 9001. FX-76S FX-86S Resolution (L/S) 3.0 μm (g+h+i-line) Projection magnification 1:1 Alignment accuracy ≦ ±0.6 μm Maximum plate size 1950 mm × 2250 mm 2200 mm × 2500 mm Tact time 56 sec/plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 58 sec/plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2