购买

¥ 25.0

加入VIP
  • 专属下载特权
  • 现金文档折扣购买
  • VIP免费专区
  • 千万文档免费下载

上传资料

关闭

关闭

关闭

封号提示

内容

首页 FEMAG块晶体生长数值模拟-如何将直拉法模拟技术拓展到区熔法生长

FEMAG块晶体生长数值模拟-如何将直拉法模拟技术拓展到区熔法生长.ppt

FEMAG块晶体生长数值模拟-如何将直拉法模拟技术拓展到区熔法…

中小学精品课件
2019-04-24 0人阅读 举报 0 0 暂无简介

简介:本文档为《FEMAG块晶体生长数值模拟-如何将直拉法模拟技术拓展到区熔法生长ppt》,可适用于自然科学领域

FEMAGSoft©HowtoextendCzmodelingtechniquestoFZgrowthModelingofFZgrowthFEMAGSoft©Globaltemperaturefield(left),meltflow(right),andalternatingmagneticfield(bottom)QuasisteadysimulationoftheFloatingZone(FZ)growthofammsiliconcrystal(mmminpullrate)ModelingofFZgrowth(cont’d)TurbulentviscosityislowandthemeltflowcanbecomputedbymeansofalaminarmodelFEMAGSoft©ModelingofFZgrowth(cont’d)InductionheatingFEMAGSoft©ModelingofFZgrowth(cont’d)*InductionHeatinginFZsemiconductorgrowthFEMAGSoft©JcurrentdensityJsourceimposedbyexternalsourceJeddyinducedbytimedependentmagneticfieldinductorsusceptorModelingofFZgrowth(cont’d)SlottedinductorTopviewSectionSS’SS’JsourceN:numberofslitsFEMAGSoft©ModelingofFZgrowth(cont’d)NumericalresultsNonslottedinductorSlottedinductorzrsusceptorinductorzrsusceptorinductorFEMAGSoft©ModelingofFZgrowth(cont’d)RealpartofmagneticfluxFEMAGSoft©ImaginarypartofmagneticfluxModelingofFZgrowth(cont’d)DifficultiesFEMAGSoft©meltatmosphereinterfaceshape(magneticpressure)openmeltingfront(thinfluidfilm)tangentialstressexertedontothemeltfreesurface:generallyundesiredresultingshearflowpotentiallyusefuleffecttocontroltheflowInductionHeatinginFZsemiconductorgrowthModelingofFZgrowth(cont’d)FEMAGSoft©InductionHeatinginFZsemiconductorgrowthBmagneticinductionmmagneticpermeabilityofvacuumselectricconductivitywangularfrequencyDissipatedpower:Forcedensity:Heatflux)Normalstress)TangentialstressAlternatingmagneticfieldeffects:InductorSusceptorModelingofFZgrowth(cont’d)DevelopmentofamathematicalmodeloftheelectromagneticfielddistributioninplanarandaxisymmetricconfigurationsHypothesis:lowvalueofthemagneticskindepthFEMAGSoft©Modelbasedonusing:amatchedasymptoticexpansiontechniquetoapproximatetheelectromagneticfieldinsidetheconductorsaFiniteElementnumericalrepresentationoftheelectromagneticfieldoutsidetheconductorsModelingofFZgrowth(cont’d)Meandissipatedpower:Meanbodyforcedensity:Equivalentnormalheatfluxqneq:Equivalentsurfacestressteq:FEMAGSoft©EquivalentmagneticstressesandheatfluxModelingofFZgrowth(cont’d)FlowandtemperaturecalculationsareperformedwithammdiametercrystalThemeltviscosityissettotimestheactualsiliconviscositytoobtainsteadyresultsRePolycrystal=ReCrystal=Pe=Gr=xMa=FloatingZoneSiliconGrowthSimulationFEMAGSoft©ModelingofFZgrowth(cont’d)*TemperaturefieldandisolinesofthenormofthemagneticfluxfunctionFEMAGFZquasisteadysimulationofthegrowthofammsiliconcrystalFEMAGSoft©ModelingofFZgrowth(cont’d)*WithequivalentmagnetictangentialstressWithoutequivalentmagnetictangentialstressTemperaturefield(left)andStokesstreamfunction(right)inthemeltFEMAGSoft©ModelingofFZgrowth(cont’d)*FEMAGFZquasisteadysimulationofthegrowthofammsiliconcrystalFEMAGSoft©(right)Temperaturefieldandisolinesofthenormofthemagneticfluxfunction(bottom)StreamfunctionisolinesinthemeltModelingofFZgrowth(cont’d)ModelvalidationFEMAGSoft©ModelingofFZgrowth(cont’d)Crystalradius:mmFeedrotationrate:RPMCrystalrotationrate:(a)RPM,(b)RPM,(c)RPMMarangonicoefficient:NmK(a)(b)(c)GoodcorrespondencebetweenpredictedandexperimentalresultsEffectofcrystalrotationrateonthemeltflow(FZgrowth)FEMAGSoft©WiththecourtesyofIKZ,BerlinModelingofFZgrowth(cont’d)FEMAGSoft©CalculationofpointdefectsinagrowingFZcrystalModelingofFZgrowth(cont’d)FEMAGSoft©Globaltemperaturefield(left),meltflow(right),andalternatingmagneticfield(bottom)QuasisteadysimulationoftheFloatingZone(FZ)growthofammsiliconcrystal(mmminpullrate)ModelingofFZgrowth(cont’d)FEMAGSoft©Growthofammsiliconcrystal(mmminpullrate)Predicteddefectdelta(CICV)distributionbymeansofaquasisteadysimulationModelingofFZgrowth(cont’d)FEMAGSoft©SecondexampleModelingofFZgrowth(cont’d)FEMAGSoft©Rs=cm,Rf=cm,Ws=rpm,Wf=rpmvpul=mmminTemperaturefieldModelingofFZgrowth(cont’d)FEMAGSoft©Rs=cm,Rf=cm,Ws=rpm,Wf=rpmvpul=mmminStreamlinesModelingofFZgrowth(cont’d)FEMAGSoft©Rs=cm,Rf=cm,Ws=rpm,Wf=rpmvpul=mmminDifferenceofinterstitialandvacancyconcentrations(CICV)ModelingofFZgrowth(cont’d)FEMAGSoft©Rs=cm,Rf=cm,Ws=rpm,Wf=rpmvpul=mmminDifferenceofinterstitialandvacancyconcentrations(CICV)(detail)ModelingofFZgrowth(cont’d)FEMAGSoft©vonMisesinvariant:globalviewanddetailRatioofthevonMisesinvariantovertheCRSSModelingofFZgrowth(cont’d)FEMAGSoft©CalculationofthermalstressesinagrowingFZcrystalwithoutconvectionModelingofFZgrowth(cont’d)FEMAGSoft©Effectofaheatshield:temperaturefieldNoconvection,Rs=cm,Rf=cm,vpul=mmmina)Withoutheatshieldb)WithaheatshieldModelingofFZgrowth(cont’d)FEMAGSoft©Effectofaheatshield:vonMisesstressa)b)<,,>growthorientationModelingofFZgrowth(cont’d)FEMAGSoft©a)b)<,,>growthorientationEffectofaheatshield:vonMisesstressModelingofFZgrowth(cont’d)TypicalFEMAGFZglobalunstructuredmeshforheattransferandinductionheatingFEMAGSoft©ModelingofFZgrowth(cont’d)FEMAGSoft©FEMAGFZtimedependentsimulationofthegrowthofasiliconcrystalUseofanequivalentthermalconductivityModelingofFZgrowth(cont’d)Freeinterfaceconstrainingloci(secondarymesh)inFZgrowthFEMAGSoft©ModelingofFZgrowth(cont’d)FEMAGSoft©InversemodelinginFZgrowthmuchmoredifficultproblemthaninCzgrowthcanleadtomisleadinginterpretationsofthesimulationresultssincecompletelyinversemodelsresultinthecalculationofthemeltvolumeandhenceparametricstudiesaredifficulttointerpretwithclassicalsimplifiedmodels,theopenmeltingfront(OMF)isimposedandthemeltingfrontiseitherimposedorcalculated(asanisotherm)ModelingofFZgrowth(cont’d)FEMAGSoft©OpenMeltingFrontafterextractionofthesinglecrystalModelingofFZgrowth(cont’d)FEMAGSoft©Mainissue:modelingoftheOpenMeltingFront(OMF)Physicalproblem:theflowofthemoltensiliconalongtheOMFandtheangleatwhichthemeltgasinterfacedetachesfromtheOMFrequireaccuratemodelinginviewoftheirdirectimpactontheradiationtransfertotheOMFandonthemeltgasinterfaceshapeNumericalproblem:thecoupledsolutionofaproblemwithinterfaces(solidificationfront,meltingfront,meltgasinterface,andOMF)andtrijunctionsrepresentsadifficultproblemofcomputationalgeometryModelingofFZgrowth(cont’d)FEMAGSoft©Otherkeyissues:Speciestransport(dopantandimpurities):theproblemissimilartospeciestransportinCzgrowth,butmuchmoredifficultsincealmostnoturbulentmixingispresentinFZgrowthOscillationsofthecrystalandorfeedrodrotationrates:thistechniqueisoftenusedtobettermixthemeltandcanbesimulatedbyuseofaquasidynamicmodelDeffects:nonaxisymmetriceffectsaregenerated(i)bytheinductorshapeandpossibly(ii)bytheuseofnonalignedcrystalandfeedrodrotationaxesModelingofFZgrowth(cont’d)FEMAGSoft©InvestigationofACRTtechniqueModelingofFZgrowth(cont’d)*InvestigationofACRTtechniqueFEMAGSoft©ModelingofFZgrowth(cont’d)*FEMAGSoft©Quasisteadysimulation:globaltemperaturefieldQuasisteadysimulation:localtemperaturefieldModelingofFZgrowth(cont’d)*FEMAGSoft©Quasisteadysimulation:globaltemperaturefieldQuasisteadysimulation:localtemperaturefieldandmeridionalvelocityvectorsModelingofFZgrowth(cont’d)*FEMAGSoft©QuasidynamicsimulationsTemperaturefieldandmeridionalvelocityModelingofFZgrowth(cont’d)*FEMAGSoft©QuasidynamicsimulationsAzimuthalvelocityModelingofFZgrowth(cont’d)*FEMAGSoft©Topright:temperaturefieldandmeridionalvelocityBottomleft:azimuthalvelocityQuasidynamicsimulationsModelingofFZgrowth(cont’d)*FEMAGSoft©DefinitionofanaverageflowforspeciestransportinversesimulationAverageflow:quasidynamicresultsarefurthertimeaveragedinordertoprovidemeanvelocity,viscosity,andheatandspeciesdiffusivityfieldsInversesimulations:timeaveragedfieldsareusedinquasisteadyorinversedynamicsimulationsinordertopredictspeciestransportinthemeltandincorporationintothecrystalUltimategoal:topredicttheresistivitydistributioninthecrystalModelingofFZgrowth(cont’d)FEMAGSoft©Quasisteadyandquasidynamic“ACRT”simulation:localtemperaturefieldandaveragemeridionalvelocityvectorsQuasisteadysimulation:localtemperaturefieldandmeridionalvelocityvectorsTheaverageflowisweakerthanthequasisteadyflowModelingofFZgrowth(cont’d)*FEMAGSoft©QuasisteadyresultsRadialvelocityAzimuthalvelocityAxialvelocityAveragequasidynamicresultsModelingofFZgrowth(cont’d)*FEMAGSoft©BoronconcentrationpredictionCalculationsfromtheinitialquasisteadysimulationCalculationsfromtheaveragedquasidynamicsimulationModelingofFZgrowth(cont’d)*FEMAGSoft©ConclusionPhysicsoftheflow:duetotheverylowmoltensiliconviscosity,thefeedrodalmostslipsontothemeltsurfaceSoalternatingthefeedrodrotationsenseonlyaffectsathinboundarylayeralongthefusioninterfaceandalimitedregionaroundtheaxisMixingefficiency:withfeedalternaterotationstheACRTtechniquehaslimitedefficiencytomixthesiliconmeltPossiblesolutions:selectionofimprovedparametersoruseofnonalignedcrystalandfeedrodrotationaxesinordertogenerateefficientDmixingModelingofFZgrowth(cont’d)****************

VIP尊享8折文档

用户评价(0)

关闭

新课改视野下建构高中语文教学实验成果报告(32KB)

抱歉,积分不足下载失败,请稍后再试!

提示

试读已结束,如需要继续阅读或者下载,敬请购买!

文档小程序码

使用微信“扫一扫”扫码寻找文档

1

打开微信

2

扫描小程序码

3

发布寻找信息

4

等待寻找结果

我知道了
评分:

/50

FEMAG块晶体生长数值模拟-如何将直拉法模拟技术拓展到区熔法生长

¥25.0

会员价¥20.0

VIP

在线
客服

免费
邮箱

爱问共享资料服务号

扫描关注领取更多福利